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Keywords: sorption
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Tribol. January 2005, 127(1): 198–205.
Published Online: February 7, 2005
... sorption lubrication capacitive sensors sliding friction mechanical contact Chemical mechanical polishing (CMP) is fast becoming the established technology in the planarization of sub-0.5 μm integrated circuit devices. Its applications include interlayer dielectric (ILD) planarization...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Tribol. July 2003, 125(3): 582–586.
Published Online: June 19, 2003
... in the ASME JOURNAL OF TRIBOLOGY . Manuscript received by the Tribology Division February 27, 2002 revised manuscript received October 3, 2002. Associate Editor: J. A. Tichy. 27 February 2002 03 October 2002 19 06 2003 chemical mechanical polishing sorption porosity interface...