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Keywords: sputtered coatings
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Journal Articles
Article Type: Technical Papers
J. Tribol. July 2001, 123(3): 641–650.
Published Online: October 31, 2000
... microscopy hardness sputtered coatings amorphous state wear resistance corrosion resistance 01 May 2000 31 October 2000 The nanoscale tribological properties of RF sputtered, ultrathin a-C films exhibiting a wide range of nanomechanical properties, surface roughness, and thickness...