Many MEM devices feature tether suspensions and it is known that the tethers induce a stiffening behavior. In this paper, we develop a model for a tether and, from it, establish several useful expressions for the nonlinear restoring forces and torques it provides. For a specific gyroscope, the expressions we find are compared to experimental results.
On the Nonlinear Dynamics of Tether Suspensions for MEMS
Contributed by the Technical Committee on Vibration and Sound for publication in the Special Section on MEMS in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received September 2002; Revised April 2003. Associate Editor: K. Grosh.
Davis, W. O., O’Reilly, O. M., and Pisano, A. P. (July 30, 2004). "On the Nonlinear Dynamics of Tether Suspensions for MEMS ." ASME. J. Vib. Acoust. July 2004; 126(3): 326–331. https://doi.org/10.1115/1.1760558
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